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| DOI | 10.1016/J.CAP.2013.04.024 | ||||
| Año | 2013 | ||||
| Tipo | artículo de investigación |
Citas Totales
Autores Afiliación Chile
Instituciones Chile
% Participación
Internacional
Autores
Afiliación Extranjera
Instituciones
Extranjeras
Plasma parameters from the discharge characteristics of a 13.56 MHz capacitively coupled radio frequency Ar plasma are evaluated on the basis of homogeneous discharge model for wide range of operating pressure. The homogeneous discharge model of capacitively coupled radio frequency discharge is modified to take into account the nonlinear plasma series resonance effect. The effect of drift velocity of the electron due to change in radio frequency electric field and operating pressure is also considered. Considerable dependent of plasma parameters on the drift velocity of the electron as well as on the plasma series resonance effect are observed in low pressure. An irregular variation of calculated plasma density with operating pressure is observed, which is reconfirmed with optical emission spectroscopy. (C) 2013 Elsevier B.V. All rights reserved.
| Ord. | Autor | Género | Institución - País |
|---|---|---|---|
| 1 | Bora, Biswajit | Hombre |
Pontificia Universidad Católica de Chile - Chile
Comision Chilena de Energia Nuclear - Chile |
| 2 | Bhuyan, Heman | - |
Pontificia Universidad Católica de Chile - Chile
|
| 3 | FAVRE-DOMINGUEZ, MARIO BENJAMIN | Hombre |
Pontificia Universidad Católica de Chile - Chile
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| 4 | WYNDHAM-HODDER, EDMUNDO SYDENHAM | Hombre |
Pontificia Universidad Católica de Chile - Chile
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| 5 | CHUAQUI-KETTLUN, HERNAN HUMBERTO | - |
Pontificia Universidad Católica de Chile - Chile
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| 6 | MENDEZ-CACERES, NATALIA ANDREA | Hombre |
Univ Malaya - Malasia
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| Agradecimiento |
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| The authors acknowledge the support of the FONDECYT 3110008 in undertaking this work. H. Bhuyan acknowledges the grant of FONDECYT 1130228. C.S. Wong is grateful to University of Malaya research grant RP008A-13AFR for support to enable him to participate in this research. The authors would like to recognize the scientific trajectory of the founder of the experimental plasma physics in Chile, Prof. H. Chuaqui, who passed away on July 27, 2012, during the peer review process of this paper. |