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| Indexado |
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| DOI | 10.1016/J.TSF.2018.01.011 | ||||
| Año | 2018 | ||||
| Tipo | artículo de investigación |
Citas Totales
Autores Afiliación Chile
Instituciones Chile
% Participación
Internacional
Autores
Afiliación Extranjera
Instituciones
Extranjeras
The performance of perovskite films in capacitor devices is strongly determined by the level of residual stresses developed after their fabrication at high temperatures. Quantification of these stresses by X-ray diffraction is not straightforward in perovskite films due to the complexity of the crystalline structure and a lack of effective elastic diffraction constants. In this work we apply a simple and accurate method to estimate the residual stresses developed in Pb(Nb, Zr, Ti)O-3 perovskite films grown by metal-organic chemical vapor deposition on the Pt electrode. The stress was directly measured in the Pt bottom electrode film before and after the deposition of the perovskite film and compared with intrinsic and thermal stresses calculations. Our results reveal in-plane tensile stresses of 676(8) MPa developed in the Pt electrode, which mainly originate from the relative thermal contraction between Pb(Nb, Zr, Ti)O-3 and Pt as well as the cubic-tetragonal perovskite phase transformation after deposition. This methodology is straightforward and highlights the possibility to perform systematic studying for tailoring stress conditions and improving the performance of perovskite films for capacitor applications.
| WOS |
|---|
| Physics, Condensed Matter |
| Physics, Applied |
| Materials Science, Multidisciplinary |
| Materials Science, Coatings & Films |
| Scopus |
|---|
| Materials Chemistry |
| Electronic, Optical And Magnetic Materials |
| Surfaces, Coatings And Films |
| Metals And Alloys |
| Surfaces And Interfaces |
| SciELO |
|---|
| Sin Disciplinas |
| Ord. | Autor | Género | Institución - País |
|---|---|---|---|
| 1 | Ramos Moore, Esteban | Hombre |
Pontificia Universidad Católica de Chile - Chile
UNIV SAARLAND - Alemania Universität des Saarlandes - Alemania |
| 2 | Leibenguth, P. | - |
UNIV SAARLAND - Alemania
Plansee SE - Austria Universität des Saarlandes - Alemania Plansee AG - Austria |
| 3 | Slawik, S. | Hombre |
UNIV SAARLAND - Alemania
Universität des Saarlandes - Alemania |
| 4 | Coelho, Rodrigo Santiago | Hombre |
SENAI CIMATEC - Brasil
|
| 5 | Horwat, D. | - |
Univ Lorraine - Francia
Université de Lorraine - Francia |
| 6 | Migot, S. | - |
Univ Lorraine - Francia
Université de Lorraine - Francia |
| 7 | Lechthaler, B. | - |
UNIV SAARLAND - Alemania
Universität des Saarlandes - Alemania |
| 8 | Mücklich, Frank | Hombre |
UNIV SAARLAND - Alemania
Universität des Saarlandes - Alemania |
| Fuente |
|---|
| CONICYT-Chile |
| Fondo Nacional de Desarrollo Científico y Tecnológico |
| Comisión Nacional de Investigación Científica y Tecnológica |
| European Commission |
| Deutscher Akademischer Austauschdienst |
| Comisión Nacional de Investigación CientÃfica y Tecnológica |
| Fondo Nacional de Desarrollo CientÃfico y Tecnológico |
| Comision Nacional de Investigacion Cientifica y Tecnologica (CONICYT-Chile) |
| EFRE Funds of the European Commission |
| Deutscher Akademischer Austauschdienst (DAAD) scholarship |
| Deutscher Akademischer Austauschdienst France |
| Agradecimiento |
|---|
| E. Ramos-Moore thanks the help of Christoph Genzel, Manuela Klaus, Donovan Diaz, Nicolas Souza, Sebastian Suarez and Agustina Guitar in the elaboration of this work. The authors thank the financial support of Comision Nacional de Investigacion Cientifica y Tecnologica (CONICYT-Chile) through the Project FONDECYT 1150357, Deutscher Akademischer Austauschdienst (DAAD) scholarship A/10/82618 and EFRE Funds of the European Commission for support of activities within project AME-Lab (C/4-EFRE-13/2009/Br). |
| E. Ramos-Moore thanks the help of Christoph Genzel, Manuela Klaus, Donovan Díaz, Nicolás Souza, Sebastián Suárez and Agustina Guitar in the elaboration of this work. The authors thank the financial support of Comisión Nacional de Investigación Científica y Tecnológica (CONICYT-Chile) through the Project FONDECYT 1150357, Deutscher Akademischer Austauschdienst (DAAD) scholarship A/10/82618 and EFRE Funds of the European Commission for support of activities within project AME-Lab (C/4-EFRE-13/2009/Br). |