The Chilean industry sector presents an extensive energy consumption which is mainly supplied by fossil fuels. The solar resource available in the country offers an opportunity to supply heat to low and medium temperature processes. The present study evaluates the techno-economical potential of generating solar process heat through a parabolic trough collector arrangement and a steam generator for 5 different processes identified in the food industry. The selected processes require steam, presenting a temperature range of 140 - 200 degrees C and pressure of 3 - 6 bar. The cost of solar-generated steam is quantified through the levelized cost of heat (LCOH) for the main regions of the Chile and compared with average fossil fuel price. The results show that the temperature of the process affects the LCOH and increasing the outlet temperature of the solar field decreases the LCOH. A geographic analysis of the LCOH for a defined process throughout the country. For most of the regions that presents higher thermal energy consumptions the solar process heat can compete with fossil fuels, considering a solar field installed cost lower than 250 US$/m(2). The sensitivity analysis carried out showed that the parameter that affect most corresponds to the steam production followed by the solar field costs.