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| DOI | 10.1063/1.5094603 | ||||
| Año | 2019 | ||||
| Tipo | artículo de investigación |
Citas Totales
Autores Afiliación Chile
Instituciones Chile
% Participación
Internacional
Autores
Afiliación Extranjera
Instituciones
Extranjeras
Classical dual-frequency capacitively coupled plasmas (2f CCPs) operating at low pressures and significantly different frequencies are often used for a variety of applications in semiconductor manufacturing in order to control the mean ion energy at the electrodes separately from the ion flux. However, recent computational studies have indicated that this separate control is limited by the frequency coupling effects and by the contribution of secondary electrons to the ionization dynamics [Donko et al., Appl. Phys. Lett. 97, 081501 (2010); Schulze et al., Plasma Sources Sci. Technol. 20, 045007 (2011)]. Here, we verify these simulation results experimentally by measuring the ion flux to an electrode as a function of the low frequency (LF) and high frequency power at different neutral gas pressures in a 2f CCP operated at 2.26MHz and 13.56MHz in argon. In agreement with previous computational predictions, we find the ion flux to decrease as a function of the LF power at a low pressure of 1mTorr due to the frequency coupling and to increase as a function of the LF power at a higher pressure of 60mTorr due to the presence of secondary electrons. These experimental findings show that separate control of ion properties in classical 2f CCPs is generally not possible, but potentially limited to specific discharge conditions.
| Ord. | Autor | Género | Institución - País |
|---|---|---|---|
| 1 | Saikia, P. | - |
Univ Malaya - Malasia
Pontificia Universidad Católica de Chile - Chile University of Malaya - Malasia Universiti Malaya - Malasia |
| 2 | Bhuyan, Heman | - |
Pontificia Universidad Católica de Chile - Chile
|
| 3 | Yap, Seong Ling | - |
Univ Malaya - Malasia
University of Malaya - Malasia Universiti Malaya - Malasia |
| 4 | Escalona, Miguel | Hombre |
Pontificia Universidad Católica de Chile - Chile
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| 5 | FAVRE-DOMINGUEZ, MARIO BENJAMIN | Hombre |
Pontificia Universidad Católica de Chile - Chile
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| 6 | WYNDHAM-HODDER, EDMUNDO SYDENHAM | Hombre |
Pontificia Universidad Católica de Chile - Chile
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| 7 | Schulze, Julian | Hombre |
Ruhr Univ Bochum - Alemania
West Virginia Univ - Estados Unidos Ruhr-Universität Bochum - Alemania West Virginia University - Estados Unidos |
| Fuente |
|---|
| FONDECYT |
| National Science Foundation |
| Fondo Nacional de Desarrollo Científico y Tecnológico |
| Deutsche Forschungsgemeinschaft |
| U.S. National Science Foundation |
| Fondo Nacional de Desarrollo Científico, Tecnológico y de Innovación Tecnológica |
| California Department of Fish and Game |
| Fondo Nacional de Desarrollo CientÃfico, Tecnológico y de Innovación Tecnológica |
| DFG (German Research Foundation) |
| Agradecimiento |
|---|
| The authors gratefully acknowledge FONDECYT Grant Nos. 1170261 and 3160179, GPF039-2018, FP053-2018, support by the DFG (German Research Foundation) within the framework of the Sonderforschungsbereich SFBTR 87 (project C1), and by the U.S. National Science Foundation (Grant No. PHY 1601080). |
| The authors gratefully acknowledge FONDECYT Grant Nos. 1170261 and 3160179, GPF039-2018, FP053-2018, support by the DFG (German Research Foundation) within the framework of the Sonderforschungsbereich SFBTR 87 (project C1), and by the U.S. National Science Foundation (Grant No. PHY 1601080). |